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Rectangular piezoresistive cantilevers with stress concentration holes opened were designed and fabricated in order to increase the response signals of piezoresistive cantilever first. Both the simulations and the measurements on the cantilever sensitivity show that this design can obviously result in an improvement on the displacement sensitivity of the piezoresistive cantilever. After a characterization...
Gold-coated microcantilevers were used to develop sensitive micromechanical biosensor for detecting mismatch mutations in DNA hybrids. The selective 5'-end immobilization of 25-mer single-stranded (ss) DNA probes to a gold-coated cantilever surface and the specific hybridization of ssDNA targets to the immobilized probe were performed by the direct electric field control. The controlled electric fields...
This paper presents a monolithic integration of piezoresistive micro-cantilevers with CMOS (complementary metal oxide semiconductor) analog amplifier and digital multiplexer based on the techniques of SOI (silicon on insulator) CMOS and MEMS (micro electronic mechanical system). The three modules, signal detection, signal selection and signal amplification, of the design are proposed step by step...
In order to increase the sensitivity of a cantilever-based biosensor, piezoresistive cantilevers with stress concentration holes were designed and fabricated. Firstly the stress distributions and the vertical displacements of the designed cantilevers were simulated through ANSYS analyzing system. Then the relative resistance changes of the piezoresistors as a function of the cantilever vertical displacements...
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