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Ultrafine ZrO 2 powder was prepared by the process of spray-ICP (inductively coupled plasma) from an aqueous solution of zirconyl chloride (ZC). The plasma was generated by a RF power with capacity of 30kW and frequency of 4 MHz. The particles obtained can be divided into two kinds according to their size. The specific surface area is more than 20m 2 /g. The chemical composition...
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