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Piezoelectric ceramics(PZT)actuator has been widely used in flexure-guided nanopositioning stage because of their high resolution. However, it is quite hard to achieve high-rate precision positioning control because of the complex hysteresis nonlinearity effect of PZT actuator. Thus, an online RELM algorithm with forgetting property(FReOS-ELM) is proposed to handle this issue. Firstly, we adopt regularized...
As the rapid progress of science and technology, the free-form surface optical component has played an important role in spaceflight, aviation, national defense, and other areas of the technology. While the technology of fast tool servo (FTS) is the most promising method for the machining of free-form surface optical component. However, the shortcomings of short-stroke of fast tool servo device have...
In order to solve the conflict between large stroke and high precision for micro positioning mechanisms, a novel 3-DOF flexible nanopositioner is proposed in this paper. The nanopositioner uses three pairs of modified differential lever displacement amplifiers (MDLDA) instead of the traditional lever amplifier to enhance the mechanism workspace. At the same time, the mechanism uses piezoelectric actuator...
A flexible nanopositioner with large stroke, high bandwidth, high precision and multi-Degrees-of-Freedom (multi-DOF) is really desired for micro/nano machining. The proposed nanopositioner is guided by four pairs of differential lever displacement amplifiers (DLDA) which consists of flexible hinge, also, kinetostatics modeling is conducted by using the Pseudo-Rigid Body (PRB) method. After a series...
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