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Nanoheterostructures of C60 fullerenes were obtained by thermal vacuum sublimation of a C60 fullerene powder onto non‐heated silicon, mica, quartz, and Ti6Al4V alloy substrates. The composition, structure, electronic and optical properties and the internal mechanical stresses of the heterostructures were studied by Raman spectroscopy, atomic force microscopy, electroreflectance modulation spectroscopy,...