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Negative-index fiber Bragg gratings (FBGs) were fabricated using 800 nm femtosecond laser overexposure and thermal regeneration. A positive-index type I-IR FBG was first inscribed in H2-free fiber with a uniform phase mask, and then a highly polarization dependent phase-shifted FBG (PSFBG) was created from the type I-IR FBG by overexposure. Subsequently, the PSFBG was annealed at 800 °C for 12 hours...
In this work, a monolithic integrated MEMS resonator was fabricated and tested. Surface micromachining method was employed to fabricate the cantilever MEMS resonator after a standard 3 µm CMOS process. The wet release method with dilute HF solution was chosen and compared to the anhydrous HF vapor release process. A release-monitoring structure with polysilicon/Au cantilever array was used to determine...
In this work, both phosphorus doped and undoped Au/Si contact structures were investigated by scanning electron microscope (SEM) and Rutherford backscattering spectrometry (RBS) analysis after annealing at 350 °C for 30 min. The effect of phosphorus doping on the performance of Au/Si inter-diffusion is discussed in this paper. The SEM image of the undoped Au/Si contact structure revealed that inverted...
Experimental results on a new method of plasma enhanced quantum well intermixing is presented. Using nitrogen plasma treatment followed by rapid thermal annealing, a 100nm-blueshift of photoluminescence peak is obtained. The new method has much weaker side-effect of etching than previously reported method using Argon plasma.
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