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Planar wire array Z pinches were carried out on the QiangGuang-I facility (1.3 MA, 100 ns). The effect of prepulse current and insulating coatings on the Z pinch behavior is investigated. Commonly there is a multichannel gas switch filled with 0.5 Mpa dry air between the transmission line and the MITL to cut off the prepulse current. By varying gas pressure filled in the switch, the parameters of...
In this paper we demonstrate the feasibility of integrating a technique for shrinking the lithography-defined feature size by using a plasma process prior to etch. The technique is based on a sequential deposition and selective removal of a polymer coating formed on the top and sidewalls of the developed resist. This method can be applied to both contacts and trenches and allows tuning of the shrink...
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