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The effect of annealing temperature on nitridation process of (0001) Al2O3 surface under ammonia flux was investigated by high‐energy electron diffraction and surface polaritons spectroscopy. High temperature annealing (≥1150 °C) of the surface results in the surface reconstruction √31×√31R±9° that inhibits the nitridation process. The external reflectivity infrared spectroscopy at near normal incidence...
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