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Sub-5µm pattern of sol-gel derived lead-zirconium-titanate (PZT) film with a thickness of 80–390nm was successfully prepared on Pt(111)/TiOx/SiO2/Si (100) substrate by a novel lift-off process using solution-processed metal oxides as a sacrificial layer. The process is simply divided into three steps: In-Zn-O (IZO) sacrificial layer spin-coating and patterning, PZT film formation followed by lift-off...
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