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Highly optically transparent and electrically conductive Al-doped ZnO (AZO) thin films were deposited by pulsed laser co-ablation of a Zn target and an Al target in an oxygen plasma. Zn ablation resulted in the reactive deposition of ZnO films assisted by the plasma, while Al ablation provided the growing ZnO films with Al dopants. The morphology, composition and structure as well as the optical and...
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