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Cu incorporated diamond-like carbon (Cu-DLC) films were deposited on Si/glass substrate by a hybrid ion beam deposition system, which consists of a direct current (DC) magnetron sputtering of Cu target and a linear ion source. The Cu concentration (from 0.1 to 39.7at.%) in the Cu-DLC films was controlled by varying the sputtering current. The dependence of residual stress, microstructure and atomic...
The interaction between impurity atom (Si, Ge, and Sn) and carbon atom in diamond-like carbon (DLC) system was investigated by the first principles simulation method based on the density functional theory. The tetrahedral configuration was selected as the calculation model for simplicity. When the bond angle varied in a range of 90°–130° from the equivalent state of 109.471°, the distortion energy...
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