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This paper demonstrates a tunable terahertz (THz) filter and a modulator based on an electrostatic micro electro mechanical systems (MEMS) reconfigurable split ring resonator (SRR) array. The device uses tunable metamaterial concept, in which an RF-MEMS (radio frequency-MEMS) capacitor is embedded in each SRR unit cell to tune the electromagnetic resonant frequency. By utilizing THz time domain spectroscopy...
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