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Microelectromechanical systems (MEMS)-based thermal flow sensors are considerably more sensitive to pressure than traditional macroscopic devices. This fact, due to the micrometric dimensions of MEMS sensors, limits the accuracy of the latter when large pressure variations cannot be avoided. In this work, we propose an original pressure compensation method that exploits the same signals produced by...
An analog circuit for the compensation of pressure effects in thermal flow meters is presented. The result is obtained by modulating the power delivered to the heater by means of a feedback loop that senses the pressure variations with no need of an additional pressure sensor. A possible system architecture is proposed and the effectiveness of the method is demonstrated by means of VHDL-AMS simulations.
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