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During the last years, anisotropic NdFeB films with good performance have been extensively investigated and widely used in application where high BHmax are required, such as microelectromechanical system(MEMS), magnetic recording media and millisize motors or actuators. So, many groups have tried to prepare NdFeB films by sputtering deposition[1]. But the permanent magnet performance of films always...
L10-FePt film has the high magnetocystalline anisotropy energy (Ku), large coercivity (HC) and it is an ideal high density magnetic recording material. However, L10-FePt ordered phase is obtained by high temperature annealing, which is prone to increase the grain size of FePt. The large size grains cause the surface roughness increase, which is the source of the noise during the recording process...
ALD HfZrO high-K fabricated by novel multi deposition multi annealing (MDMA) technique at room temperature in Ultraviolet-Ozone (UVO) ambient is systematically investigated for the first time via both physical and electrical characterization. As compared to the reference gate stack treated by conventional rapid thermal annealing (RTA) @ 600°C for 30 s (with PVD TiN electrode), the devices receiving...
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