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The PZT thin film has been successfully prepared on Pt/Ti/SiO 2 /Si substrate by pulsed laser deposition. The target is of Pb(Z r052 T i0.48 )O 3 which has excess Pb. The PZT thin film thickness is between 200 and 500 nm while the buffer layer Ti is of 50 nm thick. This paper describes the effects of deposition temperature on the crystallization...
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