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Thin metal films can disintegrate into nanoparticles upon thermal annealing. In this work, to obtain silver nanoparticles with controlled morphology, we performed a comparison study on the surface topography evolutions and agglomeration mechanisms of Ag films deposited by magnetron sputtering within-situ annealing (the heating rate is 0.33°C/s) and ex-situ rapid thermal annealing (the heating rate...
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