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This paper presents the development of the capacitive sensor to measure the growth of ice on a fuel pipe surface in a real time. The ice sensor is consisted of the pairs of electrodes to detect the change of the capacitance and the thermocouple temperature sensor to examine ice formation situation. In addition, an environmental chamber is specially designed to control humidity and temperature to simulate...
Nanofiber forests with high hydrophilicity and humidity-sensitivity are reported in this work. They are fabricated from polyimide (PI) by a plasma-stripping technique, and are utilized as a humidity-sensitive material in humidity sensors. In a relative humidity range of 50%–80%, nanofiber forest-based devices have capacitance ∼50% larger than that of PI-based sensors. Meanwhile, as the nanofibers...
A linear-response capacitive tactile sensor is presented in this work. The sensor was fabricated by the TSMC 0.35 μ m CMOS process and our self-developed MEMS post-process. The structure of the sensor consisted of one pair of parallel electrodes, with the central part of the membrane electrode hollowed out. A pillar with four beams at each side was set at the center to support the membrane electrode...
Three different measurement methods for the measurement of the pressure inside empty MEMS packages are demonstrated and discussed. They are based on measurements of capacitance, cap resonance or cap buckling. The capacitance measurement method is shown to be the most sensitive of the three methods for this application, with a pressure resolution of 11mbar.
On-die capacitance is critical parameter in power delivery analysis and design, which impacts design cost and system performance. To improve modeling accuracy, correlation was studied for on-die capacitance among internal algorithm/tool, on-die PDA, Apachepsilas RedHawk and lab measurement. Internal tool, on-die PDA is a tool to automatically simulate on-die models including Cdie, Rdie and Icc(t)...
A technique for monitoring electrostatic charge accumulation inside a hard disk drive (HDD) is described: a miniature charged plate is built into the top cover of the HDD, connected to a charged plate monitor. Experiments show that the miniature plate technique can be used for detection and measurement of the voltage induced by the charge generated inside the grounded enclosure of a hard drive.
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