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In this paper, a microelectromechanical systems fishbone-shaped electrostatic double-ended tuning fork (DETF) resonator with selectable higher modes is presented. The resonator can realize ten vibration modes with resonant frequencies from 137.929 to 913.476 kHz and multi-mode selection function. Different from conventional electrostatic actuation methods, the proposed fishbone-shaped structure combined...
This paper reports an improved-sensitivity resonant accelerometer with fishbone-shaped resonators of higher vibration modes. Different from conventional resonant accelerometer integrating with low-order vibrating resonators, our prototype utilizes higher-mode fishbone-shaped resonators based on the principle that higher vibration modes have a higher frequency sensitivity. The proposed fishbone-shaped...
In this paper, we firstly present a MEMS (microelectromechanical systems) piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism. Double ended tuning fork (DETF) resonators are actuated and sensed by piezoelectric transduction with aluminum nitride (AlN). Optimized configuration of DETF resonators and two-stage micro-leverage mechanism are proposed to enhance sensitivity...
In this study, a resonant frequency tunable silicon fishbone-shaped MEMS (micro-electro-mechanical systems) double-ended tuning fork is presented, which realizes digitally tunable resonant frequency function. Different from conventional electrostatic actuation methods, this fishbone-shaped DETF integrates six pairs of short beams on two main beams. The moment generated by the short beam causes the...
A micromachined resonant electrostatic charge sensor with enhanced responsivity by introducing dual single-stage micro-leverage mechanisms is presented. The sensor is based on the detection of resonant frequency shift of a single-crystal silicon double-ended tuning fork (DETF) element due to the axial compressive generated by the additional charge and transformed by the micro-levers. An analytic model...
In this research, a novel biaxial resonant micro accelerometer with a single proof mass is presented, which realizes decoupling effect between two orthogonal axes by decoupling beam and increases sensitivity by microleverage mechanism. This device was fabricated in commercial process of SOIMUMPs. The device was fixed on a rotating structure and put in a vacuum chamber for testing. The experimental...
We propose a new band-phase-randomized surrogate data method to evaluate the chaotic dynamics in the high (HF) and low frequency (LF) bands of heart rate variability (HRV) in healthy subjects. The chaotic strength of normal HRV as assessed by a noise titration assay completely vanished when its power spectrum was phase-randomized over the entire frequency band or the HF band alone, but not the LF...
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