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We report intermodulation distortion (IMD) in high-quality epitaxial YBa2Cu3O7-delta (YBCO) thick films and multilayers prepared by pulsed-laser deposition (PLD) using multiple targets. Two sets of films were prepared: single-layer and multilayer YBCO films in which a 20-nm-thick CeO2 inter layer is inserted between every 100-nm-thick YBCO layer. With increasing YBCO thickness from 200 nm to 1200...
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