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We report the suppression of oxygen vacancies (O v ) defects in BeO alloyed ZnO films. The alloy films are grown by plasma-assisted MBE on the sapphire substrates with a designed buffer layer. The decreased formation of O v with the increase of Be content in BeZnO alloys is confirmed by the X-ray photoelectron spectroscopy and positron annihilation spectroscopy measurements. Hall measurements...
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