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Limited travel constrains the widely application of XYZ parallel micro/nano-positioning stage. In this paper, a novel parallel-kinematics micro/nano-positioning stage is proposed with the goal of enlarging the travel range. In order to obtain a large input displacement for actuating the stage, voice coil motors (VCM) are adopted. For a large-travel parallel stage, the cross-axis motion increases the...
This paper presents the mechanical design of a novel 3-PSS (P and S represent the prismatic and spherical joints, respectively) parallel-kinematic flexure nanopositioning stage. This stage provides a high-precision motion driven by three piezoelectric actuators. By employing the compound displacement amplifier and 3-PSS parallel mechanism, the flexure nanopositioning stage can deliver two rotational...
This paper proposes the design of a compliant constant-force gripper mechanism for manipulating biological objects. It can avoid the damage induced by excessive drive displacement during the manipulation. A zero-stiffness mechanism is realized by connecting the negative-stiffness mechanism and positive-stiffness mechanism in parallel. The negative stiffness is obtained by a bistable beam mechanism...
This paper presents the design, modelling, and finite-element analysis of a new flexure-based compliant rotary stage dedicated to precision micropositioning application. As compared with previous work, the designed new rotary stage offers a larger rotational angle and more compact size. Based on the established analytical models, the dominant parameters of the stage are determined to satisfy the performance...
This paper reports on a conceptual design for a modular XYZ micro/nano-positioning stage by employing bridge amplified flexure mechanism and piezoelectric actuators. The mechanism design and analysis of a new terse parallel flexure stage with three translational degrees-of-freedom (DOF) is presented. The FEA simulation of dynamics analysis and fatigue analysis are conducted to reveal the capacity...
This paper presents the design, analysis, fabrication, and experimental testing of a two-axis micro-motion machine dedicated to precision alignment applications. The designed machine features a long alignment distance over ±5 mm in each axis and a well decoupling motion in the two axes. The design is devised using metal flexure mechanisms based on multistage leaf spring, which allows a precise movement...
Limited-angle rotational compliant mechanism is required in micropositioning applications where a high-resolution rotational motion with a large range and compact size is needed. This paper presents the conceptual design, analytical modeling, and FEA performance evaluation of a novel compliant rotational micropositioning mechanism, which is designed based on a rotary flexure bearing. To enlarge the...
The design and evaluation of a new compliant microgripper is reported in this paper on the basis of a dissymmetric mechanism. This structure has two parallelogram mechanisms which enable the generation of purely translational motion of the gripper tips. It is desirable for micromanipulation and microassembly tasks. Unlike the traditional pure-translation grippers, the presented one has a simple architecture...
In this paper, the design procedure of an auto-focusing device for a microscope is presented. To obtain a long focusing distance, a new flexure positioning mechanism is devised based on multi-stage leaf springs. The proposed device allows a precise focusing without friction and backlash effects. A voice coil motor is employed to drive the positioning mechanism. The stiffness model and resonant-frequency...
This paper presents the structure design and analysis of a novel compliant gripper based on the Scott-Russell (SR) mechanism. An SR mechanism in combination with a parallelogram mechanism enables the achievement of a pure translation of the gripper tips, which is attractive for practical micromanipulation and microassembly applications. As compared with traditional pure-translation grippers, the reported...
This paper presents mechanism and controller design procedures of a new piezoactuated flexure XY stage for micro-/nanomanipulation applications. The uniqueness of the proposed stage lies in that it possesses an integrated parallel, decoupled, and stacked kinematical structure, which owns such properties as identical dynamic behaviors in X and Y axes, decoupled input and output motion, single-input-single-output...
Piezoelectric hysteresis usually relies on the frequency of the input signal. Most of the existing rate-dependent models use a lot of parameters to capture the rate-dependent hysteresis. In this paper, a simple rate-dependent hysteresis model is proposed to describe the frequency dependency effect of a micropositioning stage driven by piezoelectric actuators. This model is extended from an enhanced...
This paper presents a new control scheme to compensate for the amplitude- and rate-dependent hysteresis behavior of a piezo-driven parallel stage developed for the application of biological cell manipulation. A variable phase-delay model with variable gain is established to describe the nonlinear hysteresis of the system. The proposed controller integrates an inverse model-based preview feedforward...
In this paper, a sliding mode control with perturbation estimation (SMCPE) using an extended Kalman filter (EKF) is proposed for the motion tracking control of a micropositioning system with piezoelectric actuation. Based on the solely measurable position information, the EKF on-line estimates not only the velocity but also the hysteresis term, which are used by the SMCPE for real-time control. The...
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