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The Excimer(combination word of excited state of dimer) UV is the most utilized pre-cleaning process in TFT manufacturing system. It removes many organic impurities on the surface of the TFT Glass as using the Ultra-Violet. Through the Excimer UV lamp, if the UV of 172nm wave is exposed by 172nm, the impurities change into the hydrophile properties. On the contrary, the Excimer UV occur the different...
A novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing...
A fully wafer-level packaged single-crystal silicon single-pole nine- throw (SP9T) MEMS switch using benzocyclobutene as a packaging adhesive layer is presented. The packaged switch shows an insertion loss of less than 0.6 dB and an average packaging loss of 0.04 dB, and an input to output isolation of better than 35 dB for all of the measured paths with little deviations up to 2 GHz.
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