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This paper reports the performance of a wireless MEMS bimorph temperature sensor integrated on a bearing for component health monitoring applications. The sensor consists of a robust array of bimorphs consisting of gold and thermally-grown oxide operable to at least 300°C. Fabrication details are included, as well as the hermetic packaging information. Speed of actuation results from a high-speed...
Presented is an inherently-robust wireless capacitive MEMS temperature sensor capable of operating to 300??C. The heart of the sensor is an array of bimorph (metal-dielectric) cantilevers whose deflections are sensed by an array of appropriately placed electrodes. The key advantages of this configuration are the following. First, its dielectric layer is SiO2 thermally-grown at 1,100??C as opposed...
Presented in this paper is the experimental quantification of the temperature uncertainty in a MEMS thermally-tunable capacitor that is especially suited for harsh-environment applications. The measured temperature uncertainty is less than 0.64degC at each point tested, and less than 3.10% for the entire operating range. This recorded resolution is limited by the capacitance resolution of the employed...
In this paper we present a new slot antenna with an embedded temperature sensor for remote sensing in harsh environment applications. When the antenna is illuminated with a plane wave it returns a signal. The returned signal's frequency is modulated by the loaded capacitance formed by an array of MEMS bimorph (metal-dielectric) cantilevers. The MEMS cantilevers deflect downwards when the temperature...
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