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An energy-dependent kinetic Monte Carlo approach was proposed to simulate the multilayer growth of BaTiO 3 thin films via pulsed laser deposition, in which the four steps, such as the deposition of atoms, the diffusion of adatoms, the bonding of adatoms, and the surface migration of adatoms, were considered. Distinguishing with the traditional solid-on-solid (SOS) model, the adatom bonding...
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