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A wide erosion magnetron sputtering system for nickel targets has been developed using a large, tall and eccentrically rotating center magnet. In this system, a water cooling unit was attached behind the target except the moving center magnet area. Therefore, the rotating mechanism of yoke magnet could be separated from the cooling water without decreasing the magnetic flux on the target surface and...
A wider eroded and higher target utilized magnetron sputtering system for ferromagnetic nickel (Ni) target was developed using a large, tall and eccentrically rotating tilted center magnet. In this system, a tilted center magnet optimized the magnetic field strength between the inner and outer erosion areas by adjusting the tilt angle, and target utilization is found to be higher up to 49% for 5-inch...
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