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Boron phosphide (BP) coatings were deposited on ZnS substrate by PACVD with diborane (B 2 H 6 ) and phosphine (PH 3 ) as the precursors. The XRD and SEM showed that all the BP coatings were amorphous when the PH 3 flux changed from 40 to 80sccm. The hardness and the elastic modulus of the BP coatings decreased with the increase of PH 3 flux. The composition...
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