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This paper reports a MEMS gyroscope that is driven by the rotating carrier's angular velocity. The structure and fabrication are introduced in the paper. The silicon processing and simulating of the sensing unit are studied. We use coventor ware to simulate structure. And in process, we use spray coating instead of spinning coating. In simulation, the first modal frequency we obtained is 220.38Hz,...
Time serial model (ARMA) and the neural network model based on single temperature input cannot describe well the behaviors of piezoelectric gyro's null drift. So the angle measurement error will not be compensated effectively. A new model based on the three layer error compensated BP neural network considering the temperature and run time input was proposed. The experiment data show that mean variance...
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