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This paper presents a 2-DOF silicon-on-insulator (SOI) microelectromechanical systems (MEMS) mirror with sidewall (SW) electrodes. The biaxial MEMS mirror with SW is actuated by electrostatic actuators. The dimension of mirror plate is 1000??m ?? 1000??m, with a thickness of 35 ??m. The analytical modeling, fabrication process, and performance characteristics are described. This paper analyzes the...
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