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This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror based on an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scan around two in-plane orthogonal axes as well as out-of-plane piston motion. The measured resonant frequencies of the fabricated micromirror are 362 Hz (piston), 685 Hz (x axis...
This paper presents a 2-axis scanning piezoelectric micromirror with zero initial tilt and no lateral shift during scanning. The piezoelectric material is a sol-gel PZT with a Zr/Ti ratio of 53/47. The unimorph PZT actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 thin-film layers, which are released via undercutting the substrate silicon. Two-dimensional scans with a 4.8° scan range have...
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