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In this paper a novel type of piezoelectric MEMS loudspeaker is presented. The device concept is based on concentrically cascaded PZT actuators making it the first two-way MEMS speaker reported. As a further novelty, the device is designed to operate without a closed membrane offering significant improvements with respect to acoustic performance, energy efficiency and manufacturability. Extensive...
This paper presents an application specific integrated circuit (ASIC) for driving piezoelectric (PZT) resonant actuated microscanners with low power consumption based on embedded capacitive position sensors. The ASIC utilizes the advantages of low driving voltages offered by the PZT actuation mechanism and the well-established low power concepts for capacitive closed-loop driving circuits. For closed-loop...
This paper presents modeling, fabrication and characterization of two designs of two-axis gimbal-less, thin-film PZT driven micromirrors with 1mm2 apertures. These micromirrors reach high frequencies for piston (21 kHz) and torsional modes (28.9 kHz) and the θopt· D product achieves up to 20.7°·mm driven by a unipolar rectangular pulse of 10 V. The combination of high frequency operation and the high...
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