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Few‐layer MoSe2 granular films were prepared using rapid thermal processing (RTP) of stacked elemental layers (SELs) deposited using electron beam evaporation in the sequence of Mo/Se/Mo. RTP was carried out at various temperatures ranging from 550 to 750 °C, and durations ranging from 90 to 150 s. Morphology and microstructure of granular thin films were characterized by atomic force microscopy and...
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