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A single-side processed dual-cantilever high-shock accelerometer in (111) silicon wafers is proposed in this paper. The device is formed by using advanced silicon surface and bulk micromachining technologies, including deep-reactive ionic etch and lateral under-etching structural release. Because the sensor is fabricated in (111) silicon wafer and has a single-chip single-side structure, it facilitates...
A novel hexa-fluoro-isopropanol-functionalized mesoporous-silica (HFMS) is constructed and loaded on integrated resonant micro-cantilevers for specific detection of trace-level trinitrotoluene (TNT) vapor. With an ultra-high specific-surface-area, an ultra-dense specific sensing-groups and an optimized pore size, the micro/nano combined cantilever sensors have shown TNT detection-limit of about 10...
Mass-loading detection of two sorts of analyte with a single resonant micro-cantilever is proposed and experimentally validated. By exciting the cantilever in different resonance modes and adsorbing the different analytes at different locations of the cantilever, the specific mass of either sort of analyte can be independently detected. The proposed micromechanical resonant cantilever sensor is designed...
The paper presents a novel single-side micromachined composite sensor, with a piezoresistive pressure sensor, a thermal-convection accelerometer and a thermometer monolithically integrated in one 2.5times2.5 mm2 chip, for low-cost production and applications such as tire-pressure monitoring systems (TPMS). The accelerometer is based on heat convection, including a micro heater and two pairs of micro...
The paper presents micromechanical cantilever sensors with self-sensing element integrated for trace-level bio/medical detection. To significantly improve sensing performance, nano-size related effects are found and utilized that mainly come from surfaces/interfaces. Such effects can be categorized into three kinds, which sequentially are the surface effects due to the cantilever dimension shrunk...
This paper reports a method for recycled immobilizing and erasing antibody at micro-cantilever surface by a coordination-bond breaking and re-linking technique. With the new method, the sensor can be re-used to immuno-detect bio-molecules for many times. By our sensing experiment to killed vaccine of Bacillus Anthracis (BA) spores with concentration of 2000 spores/ml for three times, the target loaded...
The paper reports a systematic study of the resonance-mode effect on mass-sensing performance of resonant microcantilevers by both analytic and experimental methods. Firstly the research reveals that the in-air mass-sensing resolution of resonant microcantilevers is dominated by air-drag loss limited Q-factor. Using theoretic analysis and software simulation, we conclude that a higher order mode is...
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