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We report here the design and fabrication of freestanding Hafnium dioxide (HfO2) resonant gratings. The proposed freestanding HfO2 gratings are implemented on the prepared HfO2/Silicon wafer by combining ion beam etching (IBE) of HfO2 film with deep reactive ion etching (DRIE) of silicon substrate. The grating patterns are defined by electron beam lithography and then transferred to HfO2 film by IBE...
MEMS Lamb wave ultrasonic devices have been shown to be extremely useful for applications of sensor, actuator, resonator, and so on. This paper presents the design and fabrication of Lamb wave microdevice based on ZnO piezoelectric film. The Lamb waves were respectively launched and received by both Al interdigital transducers deposited on ZnO/Al/LTO/Si3N4/Si thin piezoelectric composite plate. The...
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