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The deposition of single phase Li3xLa2/3−xTiO3 (LLTO) thin films remains very challenging. The growth of the perovskite phase is in competition with the insulating La2Ti2O7 phase when prepared at high oxygen pressure by PLD. Nevertheless, we have achieved epitaxial growth of LLTO on different (001) oriented substrates such as LaAlO3, SrTiO3 and MgO despite a large lattice mismatch of up to +8.8%....
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