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The influence of deposition conditions of nucleation GaN layer on the properties of high-temperature GaN layer, grown on sapphire substrates, was investigated. The hydride vapor phase epitaxy (HVPE) three-section horizontal hot-wall furnace technique was applied. Various temperatures, HCl flows and time intervals of nucleation layer growth were utilized. Based on previous studies the following experimental...
High temperature gallium nitride (HT-GaN) layers were grown by HVPE (hydride vapor phase epitaxy) on low temperature GaN (LT-GaN) nucleation layers deposited by HVPE. The (0001) sapphire substrates were used. The LT-GaN process parameters were as follows: HCl flow rate was 10 sccm/min, temperature 450degC and deposition time intervals 7 and 9 minutes for sample #1 and #2, respectively. The values...
Very thick (up to 100 µm) GaN layers grown by HVPE are investigated by photoreflectance (PR) and photoluminescence (PL) spectroscopies. The layers were deposited on a GaN buffer layer which was grown on a c-plane sapphire substrate by MOVPE. Both, N- and Ga-polar layers were selected to these investigations. We have observed a strong dependence of the optical properties on the polarity of GaN surface...
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