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This work focuses on a Micro-Opto-Electro-Mechanical (MOEM) vibratory gyroscope which operates in resonant condition. A custom technology performed through the adoption of a Silicon On Insulator (SOI) substrate has been considered for the development of the inertial sensor. The optical readout has been realized by using metal dielectric multilayer photonic band gap materials (PBGs). This optical structure,...
This paper reports numerical and experimental investigation on a (bulk and etch silicon on insulator) BESOI optoelectromechanical system, realized using a multilayer, metal-dielectric photonic band gap (PBG) structure. Variations in the reflectance spectrum are related to the displacement of the proof mass induced by an external acceleration. The properties of PBG transparent metals allow to obtain...
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