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Silicon carbide (SiC) microchannels show their promising merits in the applications of microchannel heat sink cooling systems, microsensor MOS devices, and UV photodiodes. The fabrication of SiC microchannels is critical for their wide applications. In this study, a laser micromilling method is utilized to process SiC microchannels. A series of SiC microchannels are fabricated using a pulsed fiber...
Grinding is an important means of realizing precision and ultra-precision machining. Vibration caused by an unbalanced grinding wheel in grinding process has a significant impact on the quality of workpiece surface. However, the effect of wheel surface topography and/or the relative vibration between grinding wheel and workpiece are not considered in most researches. Taking the relative vibration...
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