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Uniaxial tensile test is the most reliable way to measure mechanical properties of thin films. The difficulties of uniaxial tensile test are how to fabricate small and stress-free specimen, align and trip the specimen, generate small forces and measure strain. A novel tensile testing chip to measure thin film specimens with large elongation was proposed in this paper, and it was fabricated by UV-LIGA...
In order to investigate the reliability of the mechanical properties of mono-crystalline silicon thin films (thickness of 5 mum), a uniaxial tensile test and a nanoindentation test were conducted, respectively, on samples of identical composition and under identical conditions. The tensile samples were 100 mum long, 50 mun wide, and microfabricated on the silicon-on-insulation (SOI) wafer. It was...
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