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A miniaturized semiconducting metal oxide NO2 gas sensor with integrated micro heater is reported in this paper. The sensor has the size of 1×1×0.4 mm3 and detects NO2 based on the electrical conductance change of porous nanoparticles WO3 thin film, which is deposited on the interdigitated Pt electrodes. Integrated micro heater designed to provide the operating temperature above...
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