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(GdxY1–x)2O3:Eu3+ (11–14 at % Eu) phosphor films ≤150 nm in thickness have been grown by Ln(dpm)3 chemical vapor deposition on Si(100) substrates, and the chemical and phase compositions of the films have been determined. We have studied photoluminescence spectra of the films and the exact distribution of the Eu3+ activator ions over the cation sites of the solid solutions.
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