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The concept of MEMS sensors directly fabricated on a ceramic substrate, which can be used for a package of end product, was proposed. A micro accelerometer utilizing a fringe capacitance formed in a ferroelectric substrate was focused on. For this sensor, in stead of a previously used bulk PZT plate, a screen-printed BaTiO3 (BTO) film on an alumina substrate was employed in this study. A screen-printing...
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