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In this work, Mo-doped ZnO (MZO) films were prepared on glass substrate via magnetron co-sputtering of ZnO and Mo targets. Based on the x-ray diffraction (XRD) measurements, all films are crystallized into wurtzite ZnO structure with its c-axis perpendicular to the substrates. Higher growth rate leads to slightly decrease of the optical energy gap from 3.35 eV to 3.25 eV. Hall effect measurements...
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