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This paper proposes an electromagnetic MEMS motor without a winding wire. The developed motor is combined with microelectromechanical systems (MEMS) processing and multilayer ceramic technology, which is used to form a miniature three-dimensional coil inside the magnetic core. The length, width, and height of the developed motor are 11, 11, and 7.5 mm, respectively. The fabricated MEMS motor demonstrated...
In this study, the actuator system and an integrated circuit (IC) neural network for a hexapod locomotive microrobot is discussed with the aim of achieving walking motion. Miniature size robots such as insects are a field of interest in robotic studies. However, the realization of such a small robot, especially with micro-mechanisms and an artificial brain, similar to those of real organisms, is difficult...
microrobotic systems are increasingly used in medicine and other fields requiring precision engineering. This paper proposes a piezo impact-type rotary actuator and applies it to a millimeter-size robot controlled by an artificial intelligence (AI) system. The rotary actuator and robot are fabricated by micro electro mechanical systems (MEMS) technology using a silicon wafer. The actuator is composed...
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