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The dependence of nanowire width on the stiction-free structure and the influence of stiction on the electrical performance in the suspended nanowire (NW-SUS) ion-sensitive field-effect transistors (ISFETs) are investigated. The NW-SUS ISFETs without stiction are successfully fabricated using advanced microfabrication technology. The stiction-free NW-SUS ISFETs exhibit excellent electrical characteristics...
In this paper, a method to extract the signal-to-noise ratio (SNR) is proposed for the Si nanowire (Si-NW) biologically-active field-effect transistors (BioFETs). We have fabricated the devices using CMOS compatible process and demonstrated specific alpha fetoprotein (AFP) detection using the monoclonal antibody of AFP. The low-frequency noise was measured to calculate the parameter. Using our method,...
One of the major limitations in the development of ultrasensitive electrochemical biosensors based on one-dimensional nanostructure is the difficulty involved with reliably fabricating nanoelectrode arrays (NEAs). In previous work, a simple, robust and scalable wafer-scale fabrication method to produce multiplexed biosensors is introduced. Each sensor chip consists of nine individually addressable...
One of the major limitations in the development of ultrasensitive electrochemical biosensors based on one-dimensional nanostructure is the difficulty involved with reliably fabricating nanoelectrode arrays (NEAs). In previous work, a simple, robust and scalable wafer-scale fabrication method to produce multiplexed biosensors is introduced. Each sensor chip consists of nine individually addressable...
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