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Butterfly-shaped aluminum nitride (AlN) plates with anchor-to-plate angle smaller than 90° are proposed to boost the quality factor (${Q}$ ) of Lamb wave resonators (LWRs) thanks to the elimination of the anchor loss. Finite-element method simulation shows that the butterfly-shaped plate can efficiently reduce mechanical energy leakage via the supporting anchors and accordingly enhance the mechanical...
Aluminum nitride (AlN) Lamb wave resonators (LWRs) utilizing the lowest symmetric (S0) mode have attracted much interests since they have high frequencies, low motional impedances, and capability of multiple frequencies on a single chip. However, the transverse spurious modes are often strong in AlN LWR, and largely degrade the performance in application, so suppression the transverse mode is highly...
Type I Lamb wave modes exhibit a strong affinity toward multimode behavior, especially the high-transduction-efficiency modes: S0 and S1 mode. Apodization, the standard technique to suppress the transverse modes for IDT-excited resonators, suffers from drawbacks such as additional loss and reduction of the effective coupling coefficient (k2eff). Most Lamb wave modes in AlN show a positive slope in...
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