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Aluminum nitride (AlN) Lamb wave resonators (LWRs) utilizing the lowest symmetric (S0) mode have attracted much interests since they have high frequencies, low motional impedances, and capability of multiple frequencies on a single chip. However, the transverse spurious modes are often strong in AlN LWR, and largely degrade the performance in application, so suppression the transverse mode is highly...
Type I Lamb wave modes exhibit a strong affinity toward multimode behavior, especially the high-transduction-efficiency modes: S0 and S1 mode. Apodization, the standard technique to suppress the transverse modes for IDT-excited resonators, suffers from drawbacks such as additional loss and reduction of the effective coupling coefficient (k2eff). Most Lamb wave modes in AlN show a positive slope in...
High frequency bands such as LTE band 42 and band 43 require resonators and filters that can operate at frequencies higher than 3 GHz. However, existing lithium niobate fundamental symmetric (S0) lamb mode resonators and surface acoustic wave (SAW) resonators have operating frequency limitations (<2 GHz) due to their low phase velocities. High frequency AlN film bulk acoustic resonators (FBARs)...
This paper presents a 3.5 GHz aluminum nitride (AlN) microelectromechanical system (MEMS) resonator. The high frequency resonance is attained by exploiting the high phase velocity S1 Lamb mode in an AlN thin film. Finite element analyses (FEA) are employed to show a high phase velocity larger than 50000 m/s and a large electromechanical coupling of 3.6% for S1 when hAlN=0.1λ. As predicted by the simulation,...
The use of butterfly-shaped thin plates, formed by reducing the tether-to-plate angle, can raised the quality factor (Q) of aluminum nitride (AlN) Lamb wave resonators (LWRs) by eliminating the anchor loss. The finite element analysis (FEA) simulation results show that the butterfly-shaped plate can efficiently keep the vibration far from the edges at the tether-to-plate plane, so that the acoustic...
A novel technique to enhance the quality factor (Q) of Lamb wave resonator by utilizing an aluminum nitride (AlN) plate formed in a butterfly shape is investigated in this paper. In the conventional design, the Q's of the micromachined Lamb wave resonators are largely harmed by the energy dissipation through the support tethers. The finite element analysis (FEA) simulation results show that the butterfly-shaped...
The characteristics of one-port aluminum nitride (AlN) Lamb wave resonators utilizing the lowest-order symmetric mode with electrically open, grounded, and floating bottom electrode configurations are theoretically and experimentally investigated in this paper. Finite element analysis is performed to take an insight into the static capacitance characteristics of the AlN Lamb wave resonators with various...
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