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A micromachining technique is presented for the fabrication of resin-bonded permanent magnets in the microscale. Magnetic paste is prepared from NdFeB powder and an epoxy resin, filled into lithographically defined photoresist molds or metal molds, and formed into resin-bonded magnets after curing at room temperature. A coercivity of 772.4 kA/m, a remanence of 0.27 T, and a maximum energy product...
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