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Fluid flow, heat transfer, and species transport with chemical reactions have been investigated for gallium nitride (GaN) growth in a commercial metal-organic chemical vapor deposition (MOCVD) reactor. Both the growth rate and the growth uniformity are investigated zone by zone, as the wafers are divided into three zones/groups according to their distances to the susceptor center. The results show...
Gallium nitride (GaN), a direct bandgap semiconductor widely used in bright light-emitting diodes (LEDs), is mostly grown by metal–organic chemical vapor deposition (MOCVD) method. A good reactor design is critical for the production of high-quality GaN thin films. In this paper, we presented a novel buffered distributed spray (BDS) MOCVD reactor with vertical gas sprayers and horizontal gas inlets...
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