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In this paper, an indirect type iterative learning control (ILC) scheme is proposed for industrial batch processes with input delay, based on using a two-degree-of-freedom control (2DOF) internal model control (IMC) structure. An important merit is that the 2DOF IMC design for robust closed-loop control against process uncertainties and load disturbance is independent of the ILC design specifically...
Aim at the control questions of more interference factors, time-variant and oversize time delay in the proportion control of hydrogen and nitrogen in synthesis ammonia production, a self-adaptive predictive PID control scheme based on RBF neural network theory is presented, using ahead predictive to overcome large delay, and PID arithmetic based on RBF network to adjust the parameter of controller...
A promising method for controlling sheet resistance (Rs) of Cu interconnect through improved chemical mechanical planarization (CMP) endpoint capability was developed using broadband spectrometry together with feed-forward information from upstream process conditions. With this new method, the wafer-to-wafer (WTW) Rs range was reduced more than 50% compared to time-based CMP polish control.
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