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The wafer quality metrology delay is a very common phenomenon in the semiconductor manufacturing processes. Furthermore, the metrology delay is usually stochastic and time-varying, which will affect the stability and control performance of the control system. In this paper, a new kind of Run-to-Run (R2R) controller based on both Takagi-Sugeno (T-S) fuzzy model and Extended State Observer (ESO) is...
This paper presents a new PID controller model based on series leading correction, and its extension. By tuning the parameter(s) of the new PID controller, the controlled system's dynamic performance can be improved significantly. Not only reducing the maximum overshoot, but also shortening the setting time significantly. The results of simulations show the superiority of the new PID controller.
This paper presents a new PID controller model with series leading correction. The controller has a tuning parameter, by tuning the parameter, the new PED controller can reduce the controlled system's maximum overshoot and setting time significantly, so as to improve the controlled system's stability and rapidity of step response. Simulation results show the superiority of the new PID controller.
A novel discrete dimming ballast for linear fluorescent lamps is proposed in this paper. A proposed dimming control circuit is combined with a ballast module for multiple lamps to realize control of three discrete lighting levels. Compared with conventional step dimming or ON-OFF control methods, the proposed discrete dimming method has the following advantages: 1) digital signal is generated by the...
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