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The preparation process of AlN/FeCoSiB thin film composites has been studied in detail in this work. The results indicate that annealing is more effective to improve the intensity of AlN (002) peak compared with changing sputtering parameters. After annealing at 500°C, the AlN film possesses the highest intensity of (002) peak, typical columnar microstructure and root-mean-square (rms) roughness of...
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